利用波长532nm,脉宽15ns的Nd:YAG激光作用于Cu靶上,研究了产生等离子体的紫外段(180nm～300nm)发射光谱.在局部热力学平衡条件下,采用Boltzmann图表法估算了等离子体的电子温度,得到了电子温度随时间和空间的变化,以及电子温度随激光能量密度的变化.结果显示,随着激光能量的变化,电子温度有一个极大值.随着时间的发展,电子温度先减小,而后增大,接着缓慢减小.随着距靶面距离的增加,电子温度呈下降趋势. Using the Nd: YAG laser with a wavelength of 532 nm and a pulse width of 15 ns on the Cu target, the emission spectra of the ultraviolet (180 nm ~ 300 nm) emission of the plasma were studied. Under local thermodynamic equilibrium conditions, the Boltzmann diagram was used to estimate the plasma Electron temperature, the electronic temperature with time and space changes, and electron temperature with the laser energy density changes.The results show that with the laser energy changes, the electron temperature has a maximum value.With the development of time, the electron temperature First decreased, then increased, and then slowly decreased.With the distance from the target increased, the electron temperature showed a downward trend.