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综合报道南开大学光电子所为提高TFT矩阵性能与图形完整性方面所做的系列研究工作。它包括材料及器件优化研究，冗余技术的研究以及器件检测系统研究与实际应用等。通过采用SiNx/a-si界面的氢化处理Al:Ti栅金属及其AI／Ta、Al_2O_3／SiNx双绝缘层、低温致密ITO及AI腐蚀相容性工艺以及TFT动态特性研究等手段，所研制的200×151象素的TFT矩阵可基本消除线缺陷仅存少量点缺陷。最后给出用我们研制的TFT－LCD屏所显示的电视效果。
Comprehensive coverage of Nankai University Institute of optoelectronics to improve TFT matrix performance and graphics integrity of the series of research done. It includes material and device optimization research, redundancy technology research and device detection system research and practical application. By using SiNx / a-si interface hydrogenation of Al: Ti gate metal and its AI / Ta, Al_2O_3 / SiNx double insulation layer, low temperature dense ITO and AI corrosion compatibility process and TFT dynamic characteristics of research and other means developed 200 × 151 pixel TFT matrix can basically eliminate line defects only a small amount of point defects. At last, the TV effect displayed by our developed TFT-LCD screen is given.