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定性地讨论了微机械梳状驱动音叉陀螺特有的一些误差源,主要有微机械结构的 Brow nian 噪声、电路噪声、机械耦合误差及电子机械耦合误差等。对上述误差源的认识是微结构制造和电路设计的基础。
This paper qualitatively discusses some error sources specific to micromechanical comb-drive tuning fork gyro, including Brownian noise, circuit noise, mechanical coupling error and electromechanical coupling error. The understanding of these sources of error is the foundation of micro-fabrication and circuit design.