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本文提出了一种具有圆筒形反射极和圆台形鼠笼式结构的新型分离规.用数值计算的方法求出了电子和离子轨迹.对离子的引出效率和收集效率及X—射线光电流作出了实验研究.计算和实验结果表明,该分离规的几何结构和选用的电极电压对于提高灵敏度和降低X一射线光电流都是有好处的.该分离规在没有附加调制电极的情况下可实现自调制和“深度调制”来确定X—射线光电流.特别是深度调制技术,其调制系数K(定义为在X—射线光电流可略去不计、高真空条件下(10~(-8)～10~(-8))托调制状态的收集极电流对正常运用状态的收集极电流之比)的数值可小到10~(-4),使得该分离规可在比X—射线极限高2～3个数量级的压强下来确定X—射线光电流.由于结构设计的改进和电极电压的合理选择,使得其X—射线极限大大降低,和普通B—A计用几何因子作出比较所估算的X—射线极限,及用深度调制技术求得的X—射线极限均小于1×10~(-13)托(等效N_2压强).其灵敏度约为25托~(-1).
In this paper, a new type of separation gauge with a cylindrical reflector and a truncated cone-shaped squirrel-cage structure is proposed.The electron and ion trajectories are calculated numerically.The ion extraction efficiency and collection efficiency and X-ray photocurrent The experimental and experimental results show that the geometrical structure of the separator and the selected electrode voltage are good for improving the sensitivity and reducing the X-ray photocurrent.The calculation results show that the separator can be used in the absence of additional modulation electrodes Realization of self-modulation and “depth modulation” to determine X-ray photocurrents, especially depth modulation techniques, the modulation factor K (defined as X-ray photocurrent can be neglected under high vacuum conditions ) ~ 10 ~ (-8)), the value of the collector current in the modulated state to the collector current in the normal operating state) can be as small as 10-4 so that the separation gauge can be operated at a temperature lower than the X-ray limit High 2 to 3 orders of magnitude of pressure to determine the X-ray photocurrent due to the structural design of the electrode voltage and the choice of a reasonable choice, making it greatly reduced the X-ray limit, compared with the conventional B-A meter geometry to make a comparison estimated X-ray pole The X-ray limits obtained by the depth modulation technique are all less than 1 × 10 ~ (-13) Torr (equivalent N_2 pressure), and the sensitivity is about 25 Torr -1.