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采用磁控溅射方法制备类石墨碳膜(GLC)及掺杂金属Cr的类石墨碳膜(GLC-Cr),利用场发射扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、X射线光电子能谱仪(XPS)、纳米压痕仪等测试技术对比分析两薄膜样品的结构及机械性能,利用UMT-3多功能摩擦磨损试验机考察其在大气、去离子水、发动机油3种环境下的摩擦学性能.结果表明:本实验参数下制备的类石墨碳膜中,Cr的掺杂促使了类石墨碳膜中sp2杂化键的形成,降低了GLC薄膜的硬度及弹性模量,但在3种不同环境下均使得类石墨碳膜的摩擦学性能得到明显改善.其中水介质的存在可明显降低类石墨碳膜的摩擦系数,而油润滑介质虽未使得其摩擦系数明显降低,但其摩擦曲线波动性及磨损率均最小.
The graphite-like carbon films (GLCs) and the Cr-doped graphite-like carbon films (GLC-Cr) were prepared by magnetron sputtering. The films were characterized by field emission scanning electron microscopy (SEM), Raman spectroscopy (Raman), X-ray photoelectron (XPS) and nano indenter were used to analyze the structure and mechanical properties of the two thin film samples. The properties of the two films were evaluated by using UMT-3 multi-purpose friction and wear testing machine under the conditions of air, deionized water and engine oil The results show that the doping of Cr in graphite-like carbon films prepared under the experimental conditions leads to the formation of sp2 hybridization bonds in the graphite-like carbon films and decreases the hardness and elastic modulus of the GLC films, The tribological properties of graphite-like carbon films were significantly improved under the three different environments, in which the presence of aqueous media significantly reduced the friction coefficient of graphite-like carbon films, while the oil-lubricated media did not significantly reduce the friction coefficient Its friction curve volatility and wear rate are the smallest.