本标准适用于各种高、低真空阀门的性能试验。 一、总则 1.真空阀门的性能试验,主要是测量真空阀门(以下简称阀门)的漏气速率和通导能力。 2.漏气速率测量方法为关闭检漏法。在满足阀门性能要求下可采用其它检漏方法(如氦质谱检漏法),作为出厂试验。 3.试验条件: (1)被试验阀门 This standard applies to a variety of high and low vacuum valve performance test. First, the general 1. Vacuum valve performance test, mainly to measure the vacuum valve (hereinafter referred to as the valve) leakage rate and conduction capacity. 2. Leakage rate measurement method is closed leak detection method. To meet the performance requirements of the valve can be used other leak detection methods (such as helium mass spectrometry leak detection method), as the factory test. 3. Test conditions: (1) was tested valve