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菲涅耳器件是红外传感器等领域不可或缺的高性能光学元件。其高效和高精度的制造方法是目前研究的重点。文中借助单点金刚石切削技术实现菲涅耳器件加工,采用半圆头型刀具有效减小不可切削区域,并基于聚焦离子束微加工方法进行微刀具制备。对所提出方法的关键技术和制造工艺进行了详细论述。对不同应用领域的两类菲涅耳器件进行加工实验,并建立光学测试平台进行光学性能分析,实验结果表明:所提出的方法可满足菲涅耳器件的应用需求。
Fresnel devices are indispensable high-performance optical components in fields such as infrared sensors. Its efficient and high-precision manufacturing method is the focus of the current research. In this paper, single-point diamond cutting technology to achieve Fresnel device processing, the use of semicircular head-type cutting tool to effectively reduce the area can not be cut, and focus on ion beam micro-machining micro-tool preparation. The key technologies and manufacturing processes of the proposed method are discussed in detail. Two types of Fresnel devices in different application fields were processed and the optical performance of the optical test platform was established. The experimental results show that the proposed method can meet the application requirements of Fresnel devices.