论文部分内容阅读
提出了一种新型的宽带声光表面波叉指换能器 (SAW IDT) ,该换能器应用双梯形倾斜电极 ,可对单梯形倾斜电极IDT通带的高频成分进行补偿 ,使通带更宽更平直 ,并无需外补偿网络。通过计算机模拟得出IDT的优化高频补偿因子 ρ=0 12 及其他的优化参数。该器件以Y切X传Ti扩散LiNbO3 作为光波导 ,以～ 15 0nm厚的SiO2 /In2 O3 薄膜作为声波导 ,声孔径W0 =110 μm ,叉指对数 N =9。IDT的中心频率为 187 7MHz,Bragg声光带宽为 5 5 3MHz,通带斜率为 0 0 0 ,通带凹陷深度 <1 0dB。当模转换效率为 99%时 ,测得射频 (RF)驱动功率为 4 5mW ,该器件可望作为 1 15～ 1 6 5 μm红外频谱分析仪的分光器件
A new type of SAW IDT (Wide Band Acoustic Wave Surface to Surface Acoustic Wave Surface Transducer) is proposed. The double trapezoidal tilting electrode can compensate the high frequency component of the IDT passband of the single trapezoidal tilting electrode. The passband Wider and more straightforward, and no external compensation network. The optimized high frequency compensation factor ρ = 0 12 and other optimization parameters of IDT are obtained by computer simulation. The device uses Y-cut X-pass Ti diffused LiNbO3 as optical waveguide and SiO2 / In2 O3 thin film with ~ 150 nm as acoustic guide. The acoustic aperture W0 = 110 μm and the interdigital index N = 9. The IDT has a center frequency of 187 7 MHz, a Bragg acousto-optic bandwidth of 533 MHz, a passband slope of 0 0 0, and a passband recess depth of <1 0 dB. When the mode conversion efficiency is 99%, the measured RF drive power is 45mW, which is expected to be used as a spectrometer for the 15 ~ 1 65 μm infrared spectrum analyzer