单微粒铀同位素分析是核保障环境监测技术的重要手段。作为现阶段应用最为可靠,且广泛的微粒分析技术之一,FT-TIMS技术需要依赖反应堆辐照,分析步骤繁琐,效率较低。SEM-TIMS在保持原有TIMS的高测量精密度的同时,由SEMEDX完成含铀微粒的寻找和鉴别,由微操作系统进行微粒转移。该方法大幅缩短了分析流程,提高了分析效率。本文应用建立的SEM-TIMS分析方法对已知同位素组成的单分散铀氧化物标准微粒进 Single-particle uranium isotope analysis is an important means of nuclear environmental monitoring technology. As one of the most reliable and widely used particle analysis techniques at this stage, FT-TIMS technology relies on reactor irradiation with cumbersome analysis steps and low efficiency. SEM-TIMS While maintaining the high measurement precision of the original TIMS, SEMEDX was used to search for and identify uranium-containing particles, and microparticle transfer was performed by the micromanipulation system. The method greatly shortens the analysis process and improves the analysis efficiency. In this paper, the establishment of the SEM-TIMS analysis of known isotope composition of monodispersed uranium oxide standard particles into