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本文介绍了一套射频电极系统在HL-2A装置上的相关辉光放电清洗实验研究。本系统主要由具有水冷功能的螺旋结构射频电极和碟形波纹管伸缩传送装置组成。在高频交变电场作用下电子与气体分子发生碰撞的几率增加,射频电极对清除真空室器壁表面的低质量数杂质效率更高。电极通过循环水冷却,使其长时间使用不会产生明显变形,提高了该系统运行的安全性。系统工作时,通过步进电机无极调速来驱动丝杠带动与射频电极相连接传送杆压缩碟形波纹管前后运动快速调整电极位置。实验结果表明,射频天线形式的电极可作为直流辉光的阳极工作,射频辅助启辉降低了直流辉光的启辉气压和电压,提高了装置与抽气机组运行的安全性。射频辅助比纯直流辉光具有更高的清洗效率,为进一步开展与射频相关的壁处理研究提供了条件。
This article describes a set of RF electrode system HL-2A devices related to glow discharge cleaning experimental study. The system is mainly composed of a spiral structure RF electrode with water cooling function and a bellows telescopic transmission device. Under the action of high-frequency alternating electric field, the collision probability between electrons and gas molecules increases, and the radio frequency electrode is more efficient for removing low-mass impurities on the wall surface of the vacuum chamber. The electrode through the circulating water cooling, so that it will not produce significant deformation for a long time to improve the safety of the system operation. System work, stepless motor stepless speed drive to drive the lead screw and the RF electrode connected to the transmission rod compression dish bellows before and after exercise quickly adjust the electrode position. The experimental results show that the electrode in the form of RF antenna can be used as an anode of DC glow. The RF auxiliary ignition reduces the starting pressure and voltage of DC glow and improves the safety of the operation of the device and the extraction unit. The RF auxiliary has a higher cleaning efficiency than the pure DC glow, which provides the conditions for further research on RF-related wall treatment.