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该文介绍高性能PtSi肖特基势垒探测器64×128元红外CCD焦面阵列。掩埋沟道CCD成像器具有一个行间传输机构,它有22％的有效探测面积和120×60μm的像元尺寸。高性能薄型铂硅探测器的截止波长约6.0μm,而在3.0～4.5μm的光谱段有4.0～1.0％的量子效率。根据过程参数和工作电压,这些红外探测器在77K测得的暗电流密度为5到60nA/cm~2。在一个电视兼容的红外相机里,高质量的热图像通过64×128元PtSi肖特基势垒红外CCD焦面阵列得到。红外CCD照相机在没有垂直隔行扫描的情况下,以60帧每秒工作。
This article describes the high performance PtSi Schottky barrier detector 64 × 128 infrared CCD focal plane array. The buried channel CCD imager has an interline transmission mechanism which has an effective detection area of 22% and a pixel size of 120 × 60 μm. The cut-off wavelength of the high-performance thin-type platinum-silicon detector is about 6.0 μm, and the quantum efficiency is 4.0 to 1.0% in the spectral range of 3.0 to 4.5 μm. Based on process parameters and operating voltage, these infrared detectors measure a dark current density of 5 to 60 nA / cm2 at 77K. In a TV-compatible infrared camera, high-quality thermal images are obtained through a 64 × 128 element PtSi Schottky Barrier IR CCD focal plane array. Infrared CCD cameras operate at 60 frames per second without vertical interlacing.