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激光激励型真空计在极高真空环境（１０－１０Ｐａ以下）中存在的原子、分子的数目，即使在１０－１０Ｐａ的压力下，１ｍｍ３中也不过１０个左右。下面介绍确能逐个检测稀薄气体中存在的气体原子、分子的激光激励型真空计。将市售的高功率、短波长激光（例如ＡｒＦ准分子...
The number of atoms and molecules present in a laser excitation type vacuum gauge in an extremely high vacuum environment (10 to 10 Pa or less) is not more than about 10 in 1 mm 3 even under a pressure of 10 to 10 Pa. The following describes one by one can detect rare gas atoms, molecules exist in the laser-driven vacuum gauge. Commercially available high-power, short-wavelength laser (such as ArF excimer ...