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拼接式的分块镜能满足下一代望远镜更大、更轻和可折叠的要求,分块镜共相位误差的高精度检测是望远镜实现超大口径、超高分辨率成像的技术关键。从理论上证明了一个波长范围内,衍射光斑最高峰的峰值位置偏离图像中心位置的距离与共相位误差之间呈线性关系,提出了基于衍射理论的峰值位置法检测分块镜共相位误差的方法。该方法对峰值位置的定位精度要求很高,采用基于高斯拟合的峰值定位方法,在采样点为10个左右、采样间隔为5μm的条件下,定位精度可达到600nm,能够满足定位要求。实验结果表明:该方法能够有效检测分块镜的共相位误差,在一个波长的测量范围内,其测量精度能够达到λ/20。该方法系统简单,测量精度高,适合大型分块镜共相位误差的测量。
Tiled splitting mirror to meet the next generation of telescopes larger, lighter and foldable requirements, sub-block mirror high-precision co-phase error detection telescope to achieve large-caliber, ultra-high resolution imaging technology. It is theoretically proved that there is a linear relationship between the distance of the peak position of the peak of the diffraction spot from the center of the image and the phase error in a wavelength range and a method of detecting the co-phase error of the segment mirror by the peak position method based on the diffraction theory is proposed . The method requires very high positioning accuracy for peak position. With the method of peak positioning based on Gaussian fitting, the positioning accuracy can reach 600 nm under the sampling point of 10 and the sampling interval of 5 μm, which can meet the positioning requirements. The experimental results show that this method can effectively detect the co-phase error of the segmented mirrors, and the measurement accuracy can reach λ / 20 within the measuring range of one wavelength. The method has the advantages of simple system and high measuring accuracy, and is suitable for measuring the total phase error of a large segment mirror.