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微系统中低浓度微纳粒子的操控技术亟需改进和完善,介电泳(dielectrophoresis)在这一领域具有很大的潜力.以介电泳基本原理分析为基础,推导了介电泳力的复数表达式.综合分析了影响传统介电泳力和行波介电泳力的主要因素,并建立星型电极和平行电极阵列的二维理论模型,分别作为传统介电泳力和行波介电泳力的微纳粒子操控结构.设置相应的边界条件,利用实部、虚部耦合求解的方法,仿真计算两种电极上的介电泳力分布规律,为实验提供参数依据.以传统介电泳力为基础,利用星型电极进行微纳粒子收集实验;以行波介电泳力为基础,利用平行电极阵列进行微纳粒子的提升与定向驱动实验.对比分析可知,实验与理论以及仿真分析具有较好的一致性.结果表明,微系统中利用介电泳力能够有效地对微纳粒子进行相关操控.
Micromanipulation of low concentration of micro-nano particles in the control of the urgent need to improve and perfect, dielectrophoresis (dielectrophoresis) has great potential in this area.According to the basic principles of dielectrophoresis, derived the complex expression of dielectrophoretic force The main factors influencing the traditional dielectrophoretic force and traveling dielectrophoretic force are comprehensively analyzed and a two - dimensional theoretical model of the star electrode and the parallel electrode array is established, which are respectively used as the traditional dielectrophoretic force and traveling wave dielectrophoretic force micro and nano particles The structure of the control was set up, the corresponding boundary conditions were set, and the law of the distribution of the dielectrophoretic force on the two kinds of electrodes was simulated by the method of coupling the real part and the imaginary part, which provided the basis for the experiment.According to the traditional dielectrophoretic force, Electron microenagulation experiments were carried out. Based on traveling wave dielectrophoretic force, parallel electrode arrays were used to enhance and orient the micro / nano particles, and the results showed that there was a good agreement between experimental and theoretical analysis and simulation results. It shows that the use of dielectrophoretic force in micro-system can effectively control the micro-nano particles.