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在利用单壁碳纳米管(SWCNT)进行各种纳电子器件阵列的制备过程中,SWCNT的定向排列及排列阵列中部分金属性SWCNT的电特性改性是关键环节之一.提出并采用基片下倾脉冲气流定向排列方法,实现了SWCNT的可控定向排列,初步实验表明84%的SWCNT排列方向与脉冲气流方向相差在-15°～15°内;然后利用改造后的原子力显微镜(AFM)纳米操作系统对定向排列后的单根SWCNT进行了各种操作,实现了Y型SWCNT的分离、SWCNT端部催化剂颗粒的去除、SWCNT上连续纳米纽结(buckles)的制造及拉断等工作,从而为实现SWCNT尺寸与形状的控制及其电特性的改性提供了一条可行途径。
In the process of fabricating various nanoelectronic devices using single-walled carbon nanotubes (SWCNTs), the alignment of SWCNTs and the modification of the electrical properties of the partially-metallic SWCNTs in the array are one of the key aspects. The results show that 84% of the SWCNTs are arranged in a direction of -15 ° ~ 15 ° away from the pulsating airflow. Then, the modified AFM (AFM) The nano-operating system performs various operations on the aligned single SWCNTs to achieve the separation of the Y-type SWCNTs, the removal of the SWCNT end catalyst particles, the continuous manufacturing and breaking of the nano-buckles on the SWCNTs, So as to achieve SWCNT size and shape of the control and modification of electrical properties provides a viable way.