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本文对光刻胶熔融法制作微小透镜阵列的机理进行了进一步深入的理论和实验研究,特别是提出和研究了非球面表面的形成问题。对微小透镜,特别是非球面形成过程的参数控制,例如对光刻胶小圆柱的高度、熔融光刻胶和基片的接触角的控制进行了较详细的讨论。我们制出了具有较好性能的微小透镜列阵,并给出了测量结果以及实物和成象照片.最后,给出了一种建议采用的实时控制高质量微小透镜列阵形成的装置方案。
In this paper, the mechanism of the microlens array fabricated by the photoresist melting method is further studied theoretically and experimentally, especially the formation of aspheric surface is proposed and studied. Control of the parameters of the microlenses, in particular the aspheric formation process, such as the control of the height of the photoresist cylinder, the contact angle of the molten photoresist and the substrate, is discussed in more detail. We made tiny lens arrays with good performance and gave measurements as well as physical and imaging photos. Finally, a proposed scheme for real-time control of the formation of high-quality micro-lens arrays is proposed.