The recrystallization behavior of 98.5% cold rolled high purity aluminum foils annealed at 300 ℃ was investigated, and the evolution of the microstructures was followed by electron back scattered diffraction(EBSD). The results show that the recrystallization process of the high purity aluminum foils at 300 ℃ is a mixture of discontinuous- and continuous-recrystallization.The orientations of the recrystallization nuclei include not only the cube orientation, but also other orientations such as some near deformation texture components which are the results of strong recovery process. However, such continuously recrystallized grains are usually associated with relatively high free energy, so they would be consumed by the discontinuously-recrystallized grains (cube-oriented grains) in subsequent annealing. On the other hand, the patt quality index of recrystallized grains shows dependence on the crystal orientation which might introduce some errors into evaluating volume fraction of recrystallization by integrating patt quality index of EBSD.