纳米加工技术已成为国家科学技术发展水平的重要标志,国防战略发展和纳米级高精度、高质量、低损伤尖端产品的迫切需求,促进了纳米加工技术的快速发展。在纳米尺度,理解材料的变形、去除机理对于加工高质量的微纳器件至关重要,多晶材料作为制造微纳器件的主体,具有晶粒尺寸较小、大比例晶界和缺陷结构极少的特征,但目前对于多晶材料的去除机理仍缺乏研究基础和理论依据。纳米加工实验由于研究对象尺寸达到纳米量级,存在加工过程中材料的组织结构变化及缺陷演化难以动态观测和控制,可重复性差等问题,使之难以获得满意结果。从而科学计算和计算机仿真技术成为研究纳米加工 Nano-processing technology has become an important symbol of the development level of the country’s science and technology. The rapid development of nano-processing technology has been promoted by the urgent need for the development of the national defense strategy and cutting-edge products with high-precision, high-quality and low-damage nano-scale. At the nanoscale, understanding the material deformation and removal mechanisms is crucial for the fabrication of high-quality micro / nano devices. As the main body for manufacturing micro / nano devices, polycrystalline materials have the advantages of smaller grain size, large proportion of grain boundaries and very few defect structures However, the current research on the removal mechanism of polycrystalline materials is still lack of research foundation and theoretical basis. Due to the nano-scale size of the research object, there are some problems such as the change of the microstructure, the difficulty of dynamic observation and control of the evolution of defects and the poor repeatability of the material in the process of nano-fabrication, making it difficult to obtain satisfactory results. Thus scientific computing and computer simulation techniques have become the study of nano-processing