对硫化锌未灼烧的原粉、灼烧两次的粉料及分舟热蒸发研制的掺铒硫化锌电致发光薄膜器件， 用Ｘ射线衍射（ＸＲＤ）、Ｘ射线光电子能谱（ＸＰＳ）和发光亮度测试技术， 测量硫化锌原粉、粉料、薄膜的表面及内部构态， 获得微晶薄膜构态与发光中心浓度和发光亮度关系的信息． 薄膜多晶的沉积有择优取向的趋势； 对（３１１）、（４００）这些高指数的晶面， 置换需要的能量相对较小， 稀土较容易置换这些晶粒格点上的Ｚｎ２＋ ， 形成稀土发光中心； 高指数的晶面上的晶粒尺寸如增大， 它的发光强度将增强． The results show that X - ray diffraction (XRD), X - ray photoelectron spectroscopy (XPS), and X - ray photoelectron spectroscopy Luminescence brightness test technology, the measurement of zinc sulfide powder, powder, the surface and the internal structure of the film, get the relationship between the microcrystalline film configuration and luminescent center concentration and luminescence. The deposition of polycrystalline thin films tends to be preferentially oriented. For the (311), (400) crystal planes with high indices, the energy required for displacement is relatively small, and the rare earths can easily replace Zn2 + on these lattice points to form rare earth luminescence Center; high index crystal plane on the grain size increases, its luminous intensity will be enhanced.