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以高质量的 Li Nb O3 晶体为衬底 ,采用离子注入技术制备出低损耗的 Li Nb O3光波导。测试了其背散射谱 ,并对相应的结果做了分析 ,为解决光波导的横向扩散问题提供了一条可行途径
Low-loss LiNbO3 optical waveguides were prepared by ion implantation using high-quality LiNbO3 as substrate. The backscattering spectra were tested and the corresponding results were analyzed, which provided a feasible way to solve the problem of lateral diffusion of optical waveguides