Structure and microtribological characteristics of laser-arc deposited TiB2 thin film

来源 :中国科学:物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户:zoxn2008
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TiB2 thin film was deposited by laser-arc deposition method on the surface of single crystalline silicon. The morphology, composition, structure and microtribological properties of the film were studied by using XPS, XRD and atomic force/friction force mi
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