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简要介绍了椭圆偏振测量术的基本原理，并对自动椭偏仪进行了介绍。由于自动椭偏仪具有无损探测、测量准确度高和测量迅速等特点，它非常适合用于LCD薄膜系统光学性质的在线测量。
The basic principle of ellipsometry is briefly introduced, and the automatic ellipsometer is introduced. Because of its features of nondestructive detection, high measurement accuracy and rapid measurement, the automatic ellipsometer is ideally suited for on-line measurement of the optical properties of LCD film systems.