根据反应限制聚集(reactionlimitedaggregation,RLA)模型,研究表面活性剂存在时的薄膜外延生长动力学过程.研究结果表明,在二维岛的生长初期,分形岛与紧致岛具有不同的岛密度和“死”原子密度(岛的相对总面积)增长方式:分形岛密度随覆盖率生长指数小于1,紧致岛密度的生长指数大于1;分形岛相对总面积随覆盖率线性增长,紧致岛相对总面积随覆盖率非线性增长. According to the reaction restriction aggregation (RLA) model, the kinetics of thin film epitaxial growth in the presence of surfactants was studied.The results show that fractal and compact islands have different island densities and " Atomic density (relative area of ​​the island) growth pattern: the growth index of fractal island density with coverage is less than 1, the growth index of compact island density is greater than 1; the relative area of ​​fractal island increases linearly with coverage, The total area increases non-linearly with coverage.