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采用热蒸发Zn粉的化学气相沉积方法研究了氧气(O_2)流量对产物形貌和光致发光性质的影响,并采用计算流体动力学软件FLUENT模拟了O_2和锌蒸汽的浓度分布。扫描电镜照片和模拟结果显示:在O_2流量从0.06sccm到2sccm变化过程中,纳米ZnO结构从一维针状和棒状结构向三维花状结构转变。较小的O/Zn比有利于形成一维产物,较大的O/Zn比有利于生成三维产物。X射线衍射谱图说明,在合适的O_2流量下,更多的晶粒沿着c轴择优生长。光致发光谱图和模拟结果说明:随着O_2流量的增加,产物绿光发射峰强度相对减弱,紫外发射峰相对强度增加,绿光发射峰是由O空位引起的。
The effects of oxygen (O_2) flow rate on the morphology and photoluminescence properties of the product were investigated by chemical vapor deposition of thermally evaporated Zn powder. The concentration distribution of O_2 and Zn vapor was simulated using computational fluid dynamics software FLUENT. Scanning electron micrographs and simulation results show that the nanostructured ZnO nanostructures transition from one-dimensional acicular and rod-like structures to three-dimensional flower-like structures at O 2 flow rates from 0.06 sccm to 2 sccm. The smaller O / Zn ratio favors the formation of one-dimensional products, and the larger O / Zn ratio facilitates the production of three-dimensional products. The X-ray diffraction pattern shows that more grains grow preferentially along the c-axis at a suitable O2 flow rate. Photoluminescence spectra and simulation results show that with the increase of O 2 flow rate, the green emission intensity of the product is relatively weakened, the relative intensity of UV emission peak is increased, and the green emission peak is caused by O vacancies.