提出一种采用紫外光刻工艺及压印快速制造平面微透镜阵列的新技术。首先采用光刻工艺制作出平面圆柱形阵列,然后用热熔法将圆柱形阵列转化为微透镜阵列。以此微透镜阵列为母板,通过聚二甲基硅氧烷(PDMS)复制出和母板相反的模具,利用毛细效应,以SU-8为结构材料,通过特殊的压印方法得到平面微透镜阵列,可用于平面仿生复眼以及晶椎的最后制作。经过测试微透镜阵列的表面形貌和成像结果,可发现制备后的微透镜阵列聚光性能良好、光强均匀、无气泡和表面形貌均匀,解决了传统方法制作气泡多、表面形貌差的缺点。基于此方法加工的平面微透镜阵列对光学仿生复眼的进一步研究提供了有益参考。 A new technique for rapid fabrication of planar microlens arrays using UV lithography and embossing is proposed. First, a planar cylindrical array is fabricated by photolithography, and then the cylindrical array is transformed into a microlens array by hot melt method. Using this microlens array as the mother board, the mold opposite to the mother board was duplicated by polydimethylsiloxane (PDMS), and the capillary effect, SU-8 as the structural material, Lens array, can be used for the plane bionic compound eye and the final production of crystal spine. After testing the surface morphology and imaging results of the microlens array, it can be found that the prepared microlens array has the advantages of good condensing performance, uniform light intensity, no bubbles and uniform surface morphology, which solves the problems that the conventional method has many bubbles and the surface morphology is poor Shortcomings. The planar microlens array fabricated based on this method provides a useful reference for the further study of optical bionic compound eyes.