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目前激光在半导体加工处理中的应用尚不很广泛,但是,正在进行的研究和发展计划表明有希望在八十年代中期使各种成套激光加工处理系统成为半导体的重要加工设备。
The use of lasers in semiconductor processing is not yet widespread, but ongoing research and development programs show promise of making a complete range of laser processing systems an important processing device for semiconductors in the mid-1980s.