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提出了用石英晶体谐振器构成的超精密位移或压力传感器的原理.由于石英晶体振荡器有超常的精度和稳定性,因而组成的位移或压力传感器也具有极高的精度和线性。还引入双晶振的差频原理,既消除了温度影响,又提高了频率变化范围,提高了测量分辨率。
The principle of an ultra-precision displacement or pressure sensor made of a quartz crystal resonator is proposed. Due to the extraordinary precision and stability of quartz crystal oscillators, the resulting displacement or pressure sensors are also highly accurate and linear. Also introduced double-crystal differential frequency principle, both to eliminate the temperature effect, but also improve the frequency range, improve the measurement resolution.