论文部分内容阅读
Au-Ge-Ni金属化系统广泛地用在砷化镓上作合金接触。我们借助热处理研究了惰性衬底上的这三种元素的相互作用。我们的研究指出,Ni的作用相当于消耗从Au中扩散出来的Ge(通常Au和Ge同时蒸发),Ge进入Ni层后形成稳定的化合物。除少量Au扩散入Ni层以外,此二元素间没有互作用。我们还发现,如果指望获得均匀的合金层,则蒸发的Ge量与Nf量之比是十分重要的。
Au-Ge-Ni metallization systems are widely used for alloying contact with gallium arsenide. We studied the interaction of these three elements on an inert substrate by means of heat treatment. Our research indicates that the role of Ni is equivalent to consuming Ge diffused from Au (usually Au and Ge evaporate at the same time) and Ge forms stable compounds upon entering the Ni layer. With the exception of a small amount of Au diffusing into the Ni layer, there is no interaction between the two elements. We have also found that it is important to calculate the ratio of the amount of Ge to the amount of Nf evaporated if a uniform layer of alloy is expected.