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测量了冷阴极电弧源镀膜时膜沉积率及源喷出的微粒空间分布。为了获得最大沉积率及减少膜层中微粒,给出了工件最佳工作位置选择。
The film deposition rate and the spatial distribution of particles emitted by the source were measured when the cold cathode arc source was coated. In order to obtain the maximum deposition rate and reduce the particles in the film, the optimal working position of the workpiece is given.