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本文简述了工作台闭式气浮导轨的理论分析与实验研究的结果。研制实践表明;闭式气浮导轨具有精度高、刚度高、稳定性好等特点,满足了高速高精度工作台的要求。本文采用有限差分法进行分析,提出了闭式导轨的设计计算公式。它比目前采用的叠加开式导轨特性曲线求取闭式导轨特性的办法更简便,并且可得到不同参数下承载特性曲线及找到闭式导轨的最佳刚度点;实验结果与理论分析比较吻合。
In this paper, the theoretical analysis and experimental results of the bench closed airfoil guideway are briefly described. The practice shows that closed air bearing has the characteristics of high precision, high rigidity and good stability, which meets the requirements of high speed and high precision worktable. In this paper, the finite difference method is used to analyze the design formula of the closed guideway. It is more simpler to calculate the characteristics of the closed guideway than the curve of the superimposed open guideway currently used, and the optimal stiffness point under different parameters and the closed guideway can be obtained. The experimental results are in good agreement with the theoretical analysis.