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光学薄膜常数—折射率、消光系数和膜层厚度是光学薄膜制备的基础,通过透射光谱法测试计算得到的薄膜常数具有较高的精度。Ta2O5是一种常用的氧化物薄膜,研究了两种透射光谱法计算光学薄膜常数的精度,利用Lambda900分光光度计获得了Ta2O5薄膜样品的透过率光谱数据,采用透射光谱包络线法对单层Ta2O5薄膜样品的光学常数进行计算,得到的折射率和消光系数较为准确,并且认为所得到的消光系数为广义消光系数,对精确地测试、计算提出了建议,为不同薄膜样品的制备奠定了技术基础。
Optical film constants - refractive index, extinction coefficient and film thickness are the basis of the optical film preparation. The film constants calculated by transmission spectroscopy have high precision. Ta2O5 is a common oxide thin film. The precision of optical film constants calculated by two kinds of transmission spectroscopy was studied. The transmittance spectra of Ta2O5 thin films were obtained by Lambda900 spectrophotometer. The calculation of the optical constants of the Ta2O5 film samples shows that the refractive index and extinction coefficient are more accurate, and the extinction coefficient obtained is considered as a generalized extinction coefficient. It provides some suggestions for accurate testing and calculation, and lays the foundation for the preparation of different thin film samples technical foundation.