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In this paper,we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructuresbased power-generators demonstrating an energy conversion from an environmental mechanical/ultrasonic energy to an electrical energy.The ZnO nanostructures are grown on a silicon wafer by a modified chemical solution method(CSD,chemical-solution-deposition) with a two-step thermal-oxidation approach.The synthesis process can be completed within 1 h.By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with0.75 mol/l concentration in the℃SD process,the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures(i.e.,dandelion-like nanostructures,columnar nanostructures,and nanowires).Furthermore,through oxidizing at different temperatures in the thermal-oxidation process,the featured geometry of the nanostructures(e.g.,the length and diameter of a nanowire) is modified.The geometry,size,morphology,crystallization,and material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction.Finally,the nanostructures are used to fabricate several micro power-generators.Through the piezoelectric effect,a maximum current density output of 0.28 mA cm2generated by a power-generator under an ultrasonic wave is observed.
In this paper, we report a rapid synthesis of piezoelectric ZnO-nanostructures and fabrication of the nanostructures based power-generators demonstrating an energy conversion from an environmental mechanical / ultrasonic energy to an electrical energy. The ZnO nanostructures are grown on a silicon wafer by a modified Chemical solution method (CSD, chemical-solution-deposition) with a two-step thermal-oxidation approach. The synthesis process can be completed within 1 h. By varying the mixture-ratio of Zn micro-particles in an oxalic acid solution with 0. 75 mol / l concentration in the ℃ SD process, the growth mechanism is well-controlled to synthesize three different types of ZnO-nanostructures (ie, dandelion-like nanostructures, columnar nanostructures, and nanowires) the thermal-oxidation process, the featured geometry of the nanostructures (eg, the length and diameter of a nanowire) is modified. The geometry, size, morphology, crystallization, a nd material phase of the modified nanostructures are characterized by scanning electron microscopy and X-ray diffraction. Finaally, the nanostructures are used to fabricate several micro power-generators. Through the piezoelectric effect, a maximum current density output of 0.28 mA cm2generated by a power -generator under an ultrasonic wave is observed.