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研究了汽相沉积过程中的衬底表面凹结构的成核热力学，指出可以通过衬底表面微结构设计来控制成核过程以实现点状结构的生长．计算了凹结构内的临界核形成能，表明与平面相比成核优先在凹结构发生．考虑凹结构的“等效势阱”效应，发现凹结构内稳定原子团的生长速率远远大于平面处稳定原子团的生长速率．
The nucleation thermodynamics of the concave structure on the surface of the substrate during the vapor deposition process is studied. It is pointed out that the nucleation process can be controlled by the microstructure design of the substrate surface to realize the growth of the dot structure. The critical nucleus formation energy in the concave structure was calculated, indicating that nucleation preferentially occurred in the concave structure compared to the plane. Considering the “equivalent potential well” effect of the concave structure, it is found that the growth rate of the stable atomic groups in the concave structure is far greater than that of the stable atomic groups in the plane.