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白光垂直扫描干涉测量方法具有高精度、大量程并且为非接触测量等优点,因此被广泛地应用于半导体、微机电系统(MEMS)等检测领域。传统的白光扫描干涉仪采用压电(PZT)陶瓷驱动器,虽然能实现高精度的测量,但存在量程小、测量效率低等缺点。基于此,提出了以步进电机作为驱动器、高精度光栅尺作为位置反馈的白光干涉垂直扫描运动平台,并设计了以现场可编程逻辑门阵列(FPGA)为核心处理器的控制板卡。实验证明,该运动平台在运动速度为50μm/s时,定位偏差小于15 nm,最大行程为3 mm,实现了高精度、大行程以及高效率的扫描检测。可以以较低的成本实现对具有高深宽比的微纳器件形貌的检测。
The white vertical scanning interferometry is widely used in the field of semiconductor, micro-electromechanical systems (MEMS) and other detection due to its advantages of high precision, large range and non-contact measurement. The traditional white-light scanning interferometer uses the piezoelectric (PZT) ceramic actuator, although it can achieve high-precision measurement, but there is a small range, low measurement efficiency and other shortcomings. Based on this, a white-light interference vertical scanning motion platform with stepping motor as driver and high-precision grating as position feedback is proposed and a control board with field programmable gate array (FPGA) as the core processor is designed. Experiments show that the moving platform with the moving speed of 50μm / s, the positioning deviation of less than 15 nm, the maximum travel of 3 mm, to achieve high precision, large stroke and high-efficiency scanning detection. The detection of the topography of a micro / nano device with a high aspect ratio can be realized at a lower cost.