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本文介绍了ＡＧＡ－１００型四级质谱计分析和真空系统污染后的清洗方法，并对清洗前后的性能指标做了对照测试，结果表明此法是可行的．
This article introduces the AGA-100 type four mass spectrometer analysis and vacuum system after the cleaning method of pollution, and cleaning performance indicators before and after a controlled test, the results show that this method is feasible.