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本文详细叙述了ＤＦＢ激光器的设计要点和新的工艺。采用一级全息光栅和二步液相外延法批量研制出高稳定单纵模工作的１．５５μｍ分布反馈激光器（ＤＦＢ—ＬＤ）。外延片成品率＞４０％。器件特性：２５℃时阈值电流２０ｍＡ，单面光功率＞１０ｍｗ，主边模抑制比ＳＭＳＲ达４３ｄＢ（λ／４相移光栅），谱线宽度△ν－２０ｄＢ＝０．３ｎｍ，调制速率＞１．８ＧＨｚ。可靠性测试显示：高温监测光谱稳定，２５°Ｃ时阈值退化率△Ｉｔｈ／ｔ＜０．３ｍＡ／ｋｈ，对应器件预估寿命将超过１０万ｈ。
This article describes the DFB laser design points and new technology. A 1.55μm distributed feedback laser (DFB-LD) with high stability and single longitudinal mode was developed in batches by a holographic gratings and two-step liquid-phase epitaxy. Epitaxial wafer yield> 40%. Device characteristics: 25mA threshold current 20mA, single-sided optical power> 10mw, the primary side mode suppression ratio of 43dB SMSR (λ / 4 phase shift grating), line width △ ν-20dB = 0.3nm, modulation rate> 1 .8GHz. The reliability test shows that the spectrum of high temperature monitoring is stable, the threshold degradation rate ΔIth / t <0.3mA / kh at 25 ° C, and the estimated lifetime of the corresponding device will exceed 100,000 h.