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为了获得最高的工作效率,激光驱动器被设计使用于光学元件的损伤阈值附近,不可避免地产生高通量密度下的元件损伤,及时掌握元件损伤情况关系到工作人员和装置的安全,损伤在线检测技术研究具有重要意义。介绍了光学元件损伤在线检测系统的工作原理,针对驱动器终端光学组件的特点,确定了明场成像损伤在线检测的技术路线。利用设计搭建的实验系统成功获取了神光Ⅲ原型装置Ⅰ型终端打靶透镜、倍频晶体,以及引导反射镜的损伤图像。实验系统横向分辨率为0.13mm,纵向定位精度为30mm,损伤图像清晰可辨,满足检测要求。研究结果为该技术的工程应用提供了技术支撑。
For maximum efficiency, the laser driver is designed to be used near the damage threshold of optical components, which inevitably causes component damage at high flux densities and provides timely access to component damage related to the safety of personnel and equipment, and damage detection online Technical research is of great significance. The working principle of on-line optical damage detection system is introduced. According to the characteristics of optical components of driver terminal, the technical route of on-line detection of bright field imaging damage is determined. The experimental setup of the system was successfully used to acquire the type I terminal targeting lens, frequency doubling crystal and the guided mirror of Shen Guang Ⅲ prototype device. Experimental system horizontal resolution of 0.13mm, vertical positioning accuracy of 30mm, damage the image is clear and legible to meet the testing requirements. The research results provide technical support for engineering application of this technology.