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微型机械是80年代后期崛起的新兴热点技术。本文从微型机械的历史背景入手阐述了目前微型机械的定义、主要组成部分、主要的工艺方法、国外的研究状况及应用前景,最后介绍微型机械在我国的发展状况。
Micro-mechanical is the emerging hot technology emerging in the late 1980s. This paper elaborates the definition, the main components, the main technological methods, the research status and the application prospects of the micromachines from the historical background of micromachines. Finally, it introduces the development of micromachines in our country.