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本文介绍一种对充气器件进行长期质谱分析采样的技术。作者利用自制的平面型微孔流量阀门及四极质谱系统,研究CO_2激光器的寿命,发现了一些有意义的现象,指出阴极材料溅射所造成的吸气是导致激光器寿命终结的主要原因。
This article describes a technique for long-term mass spectrometry sampling of inflatable devices. The authors used self-made planar microporous flow rate valves and quadrupole mass spectrometry systems to study the lifetime of CO 2 lasers and found some meaningful phenomena. It is pointed out that aspiration caused by cathode material sputtering is the main reason leading to the end of laser lifetime.