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根据能量平衡原理 ,导出了脉冲激光作用靶材的烧蚀率公式 ,并根据流体动力学理论 ,得出了脉冲激光产生的等离子体的空间运动特性方程 ,将靶材烧蚀率公式与等离子体空间动力学方程结合起来 ,根据实验研究了不同激光功率密度和波长对KTa0 6 5Nb0 .35O3(KTN)薄膜沉积特性的影响 ,得到了一些有价值的结果 ,并对结果进行了详细的讨论 ,理论计算结果与实验大体符合 .
According to the principle of energy balance, the ablation rate equation of pulsed laser target is deduced. Based on the theory of fluid dynamics, the equation of the space motion of the plasma generated by pulsed laser is obtained. The equation of target ablation rate is compared with the plasma Space kinetic equation, the influence of different laser power density and wavelength on the deposition characteristics of KTa0 6 5Nb0 .35O3 (KTN) thin films was studied experimentally. Some valuable results were obtained and the results were discussed in detail. The theory The calculation results are in good agreement with the experiment.