CoFeV/TiZr多层膜界面结构在其极化超镜产品中起着重要的作用。针对膜层需求设计、制备了不同结构的CoFeV/TiZr膜层样品,应用极化中子镜反射技术研究了CoFeV/TiZr复合薄膜材料的膜层结构,获得了薄膜材料的膜层厚度、界面粗糙度、界面扩散层等结构参数。结果表明,多层膜膜层界面粗糙度变化可采用粗糙度递增律进行描述,界面扩散约0.5 nm,膜层制备工艺基本达到预期目标。 The CoFeV / TiZr multilayer film interface structure plays an important role in its polarized ultra-mirror products. According to the requirements of the film design, samples of CoFeV / TiZr film with different structures were prepared. The film structure of the CoFeV / TiZr composite film was studied by using the polarized neutron mirror reflection technique. The film thickness, interface roughness Degree, interface diffusion layer and other structural parameters. The results show that the interface roughness of the multi-layer film can be described by the law of increasing roughness, the interface diffusion is about 0.5 nm, and the preparation process of the film basically meets the expectation.