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在1993年10月于德国纽伦堡举行的第六届国际传感与系统技术博览会及学术会议上,介绍了一种集成涡流探测器阵列。该阵列由总长25mm的64个磁阻元件组成,采用薄膜工艺制作。激励磁场由环绕线列的环状共用线圈产生。每个传感单元都可以检测到由涡流在受检物体内部产生的磁场畸变,由此获得传感器下方与检测物体的几何形状或材料特性相关的分布轮廓线。
At the Sixth International Sensing and Systems Technology Expo and Conference, held in October 1993 in Nuremberg, Germany, an integrated eddy current detector array was introduced. The array consists of 64 magnetoresistive elements with a total length of 25mm and is fabricated using a thin-film process. The excitation field is generated by a ring-shaped common coil that surrounds the line array. Each sensing unit can detect magnetic field distortions generated by vortices inside the object to be examined, thereby obtaining a profile of the profile under the sensor that correlates with the geometry or material properties of the object under inspection.