论文部分内容阅读
回顾了步进高度测量技术在纳米计量中的应用 .分析了在步进高度测量技术中的一些分析方法、算法和误差源 ,表明了不同的算法会导致不同的结果 .提出了步进高度测量中的最佳操作过程 .
The application of stepping height measurement technology in nanometer measurement is reviewed.The analysis methods, algorithms and error sources in stepping height measurement technology are analyzed, which show that different algorithms can lead to different results.A step height measurement In the best course of operation.