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采用严格耦合波分析方法研究了长波红外波段锗基底的圆柱形周期阵列仿生蛾眼抗反射微结构的衍射特性,并进行理论分析和模拟仿真验证。重点分析了周期、深度、占空比和整体面型轮廓等参数对微结构抗反射特性的影响,得出具有较好抗反射效果的结构组合参数。采用二元曝光技术和反应离子刻蚀技术在锗基底上制备该亚波长周期微结构。通过热场发射扫描电子显微镜对微结构表面形貌进行表征,并应用红外成像光谱仪在长波红外波段分别对双面抛光锗片、单面微结构和双面微结构进行测试对比,结果显示在8~12μm范围内双面微结构的反射率小于8%,基本达到设计要求。
The diffraction characteristics of anti-reflective micro-structure of bionic moth-eye of cylindrical periodic array germanium substrate in long-wave infrared region were studied by rigorous coupled-wave analysis method, and the theoretical analysis and simulation were verified. The effects of parameters such as period, depth, duty cycle and overall profile on the anti-reflective properties of microstructures are analyzed emphatically. The structural parameters with good anti-reflective effect are obtained. The sub-wavelength periodic microstructure was prepared on germanium substrate by binary exposure and reactive ion etching. The surface morphology of the microstructure was characterized by thermal field emission scanning electron microscopy. The infrared imaging spectroscopy was used to test the double-sided polished germanium sheet, single-sided microstructure and double-sided microstructure in the long-wave infrared band. The results showed that in the 8 The reflectivity of the double-sided microstructure in the range of ~ 12μm is less than 8%, basically meeting the design requirements.