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针对目前无线传感网络节点对长寿命微能源的需求,提出了将同位素辐射能量转换为电能的静电式振动能量收集原理.该原理利用同位素63Niβ辐射能实现平行板悬浮-质量块结构的自由阻尼振动,并通过可变电容电路实现充-放电振荡循环,从而实现电能的转换.通过分析运动状态和能量转化过程,给出了结构的运动状态和能量输出方程,并使用Matlab/Simulink对输出特性进行了数值模拟和基于Ansys的结构优化设计.根据仿真和优化的结构尺寸设计出了满足最大平均输出功率的微电子机械器件结构.结果表明:所设计的结构在一阶固有频率为500 Hz,两极板间距离为75μm,外接电阻为90 k?时平均输出功率最大为0.416μW,转化效率8.25%.
Aiming at the current demand of wireless sensor network nodes for long-life micro-energy, the electrostatic vibration energy collection principle is proposed to convert isotope radiant energy into electric energy. This principle uses isotope 63Niβ radiation to achieve free damping of the parallel plate suspension mass structure Vibration and charge-discharge oscillating cycle through a variable capacitance circuit to achieve the conversion of electric energy.Through analyzing the state of motion and the process of energy conversion, the equations of motion state and energy output of the structure are given and the output characteristics The numerical simulation and the structural optimization design based on Ansys are carried out.The structure of the microelectromechanical device that meets the maximum average output power is designed according to the simulation and optimization of the structure size.The results show that the designed structure has the characteristic that the natural frequency of the first order is 500 Hz, The distance between two plates is 75μm, the average output power is 0.416μW when the external resistance is 90kΩ, and the conversion efficiency is 8.25%.