专利申请范围这种传感器是由在壳体内壁形成的内腔中安装一个膜片组合件所组成。该组合件是用静电法把对应变敏感的硅膜片焊在与其有大体相同温度系数、带有轴线孔的玻璃支座上。硅膜片沿边缘焊在玻璃支座的一端,使两者成为一体。发明的详细说明此发明是关于利用在硅膜片上形成的压阻应变计测量压力的一种压力传感器。更具体地 Patent Application This sensor consists of a diaphragm assembly mounted in a cavity formed in the inner wall of a housing. The assembly is a static method to the strain-sensitive silicon film welded to have substantially the same temperature coefficient, with a hole in the axis of the glass holder. The silicon diaphragm is welded along the edge to the end of the glass support so that the two are integral. DETAILED DESCRIPTION OF THE INVENTION This invention relates to a pressure sensor for measuring pressure using a piezoresistive gauge formed on a silicon diaphragm. More specifically