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采用GaAs PHEMT工艺研制开发了一款6～18 GHz五位MMIC数字移相器。通过建立精确的器件模型、选择合理的单位拓扑以及设计优化原理图和版图,并在优化过程中采用性能冗余优化策略,保证了产品各项性能优异和高成品率。测试的电性能典型值表明,在工作频率范围内,11.25°/22.5°移相位的相移误差<2.5°,45°/90°/180°移相位的相移误差<5°,相移均方根误差<4.5°,插入损耗保持在7dB～10.5dB的范围内,32种相移态输入端与输出端的驻波比均小于1.7,最终芯片面积仅为3.555mm×4.055mm×0.1mm,可广泛用于相控阵雷达与电子对抗等系统。
A GaAs PHEMT process was used to develop a five-phase MMIC digital phase shifter with 6 ~ 18 GHz. Through the establishment of accurate device model, select a reasonable unit topology and design optimization schematics and layout, and optimization of the performance of redundant optimization strategy to ensure that the product performance and high yield. The typical electrical performance of the test shows that the phase shift error of the phase shift of 11.25 ° / 22.5 ° is less than 2.5 ° and the phase shift error of the phase shift of 45 ° / 90 ° / 180 ° is less than 5 ° in the working frequency range The root mean square error is less than 4.5 ° and the insertion loss is kept within the range of 7dB ~ 10.5dB. The VSWRs of 32 kinds of phase shift inputs and outputs are both less than 1.7 and the final chip area is only 3.555mm × 4.055mm × 0.1mm. Can be widely used in phased array radar and electronic warfare systems.