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用纳米硅 (nc_Si∶H)薄膜制成了纳米硅 单晶硅 (nc_Si∶H c_Si)异质结二极管 ,对nc_Si∶H c_Si异质结的特性进行了研究 ,它具有很好的温度稳定性 .温度从 2 0℃上升到 2 0 0℃ ,I_V曲线只有很小的漂移 .对nc_Si∶H c_Si异质结二极管的输运机理进行了讨论 .
Nanocrystalline silicon (nc_Si: H c -Si) heterojunction diode was fabricated by using nanocrystalline silicon (nc_Si:H) thin film. The properties of nc_Si:H c_Si heterojunction were studied. It has good temperature stability When the temperature rises from 20 ℃ to 200 ℃, the I_V curve has only a small drift.The transport mechanism of nc_Si:H c_Si heterojunction diode is discussed.