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介绍了一种新的微形单片式电容压力传感器(CPT1),其灵敏度比压阻应变式压力传感器高20倍,功率仅为后者的1％,而且通过现行的集成电路工艺可以批量生产。第二种器件(CPT11)是将双极信号处理电子线路一并制作在同一芯片上,产生一种周期与压力有关的低荷周脉冲式输出。这种输出形式有助于解决引线间的短路问题,引线间的短路是植入医学应用中造成压阻传感器长期漂移的基本原因之一。由于本文提出的传感器是以电容变化作为传感机理而不是采用压阻效应,因而对温度引起的压阻系数的漂移不甚敏感。植入医学应用领域传感器最佳选择应当是尺寸小、灵敏度高、良好的长期线基稳定性和功耗的显著减小。这些性能对其它压敏应用——从汽车到民用工业也是很重要的。
A new micro-monolithic capacitive pressure sensor (CPT1) is introduced, which is 20 times more sensitive than a piezoresistive strain gauge pressure sensor and has a power of only 1% of the latter, which can be mass-produced by the current integrated circuit technology . The second device, the CPT11, is a bipolar signal processing electronics fabricated on the same chip, producing a cycle-and-pressure low-cycle pulsed output. This form of output helps to solve the problem of shorting between leads, and the short between leads is one of the basic reasons for the long-term drift of piezoresistive sensors in implantable medical applications. Since the sensor proposed in this paper uses the capacitance change as the sensing mechanism rather than the piezoresistive effect, it is less sensitive to the temperature-induced shift in the piezoresistive coefficient. The best choice for sensors for implantable medical applications should be small size, high sensitivity, good long-term wire-based stability and a significant reduction in power consumption. These properties are also important for other pressure-sensitive applications - from the car to the civilian industry.