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利用射频磁控反应溅射制备了Ti1 -xCoxO2 薄膜样品 .超导量子干涉仪 (SQUID)测量了样品在常温 ,低温下的磁特性 .结果显示样品在常温下已经具有明显的铁磁性 .常温时其矫顽力 32× 10 3A m ,饱和磁化强度 5 5emu/cm3 磁性元素的磁矩达 0 6 79μB/Co.饱和场 12× 10 4 A m .x射线衍射 (XRD)和x射线光电子能谱 (XPS)实验分析初步表明样品中没有钴颗粒 .
The samples of Ti1-xCoxO2 thin films were prepared by RF magnetron reactive sputtering.The magnetic properties of the samples were measured at room temperature and low temperature by the SQUID.The results show that the samples have obvious ferromagnetism at room temperature, The coercive force is 32 × 10 3A m, the saturation magnetization is 5 6 mA / cm 3, the magnetic moment is 0 6 79 μB / Co, the saturated field is 12 × 10 4 A m. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) experimental analysis showed that there is no cobalt particles in the sample.